Conference Presentations (2001)
L.S. Adam, M.E. Law, S. Hedge, & O. Dokumaci, “Comprehensive model for nitrogen diffusion in silicon,” Electron Devices Meeting, 2001. IEDM Technical Digest. International, p. 38.5.1-4, December 2001.
Lahir Shaik Adam, Lance Robertson, Mark E. Law, Kevin Jones, Kevin Gable, Suri Hegde and Omer Dokumaci, “Diffusion of Implanted Nitrogen in Silicon at High Doses,” Mat. Res. Soc. Symp. Proc., 669, J3.10.1-6, 2001.
Omer Dokumaci, Richard Kaplan, Mukesh Khare, Paul Ronsheim, Jay Burnham, Anthony Domenicucci, Jinghong Li, Robert Fleming, Lahir S. Adam & Mark E. Law, “Diffusion and Defect Structure in Nitrogen Implanted Silicon,” Mat. Res. Soc. Symp. Proc., 669, J6.4.1-6, 2001.
C. Camarce, L. Radic, P. Keys, R. Brindos, K.S. Jones and M.E. Law, “Modeling of Dopant Defect Interactions,” Mat. Res. Soc. Symp. Proc., 669, J9.1.1-9, 2001.
Ibrahim Avci, Mark E. Law, Erik Kuryliw and Kevin S. Jones, “Modeling the Nucleation and Evolution of End of Range Dislocation Loops in Silicon,” IEDM Technical Digest, 835-838, 2001.
L.S. Robertson, J. Jacques, K.S. Jones, M.E. Law, D.F. Downey, M.J. Rendon and D. Sing, “Co-implantation of Boron and Fluorine in Silicon,” International Workshop on Junction Technology, Tokyo, Japan, November 2001.
Kevin S. Jones, Mark E. Law, Richard Brindos, and Patrick Keys, “TEM Studies of Ion Implantation Damage in ULSI Technology,” Microsc. Semicond. Mater. Conf., Oxford, March 2001.