Conference Presentations (2007)

Conference Presentations (2007)

N. G. Rudawski, K. S. Jones, and R. G. Elliman, “Influence of As on stressed solid phase epitaxy in patterned Si wafers,” International Workshop on INSIGHT in Semiconductor Device Fabrication, Metrology, and Modeling (2007).

S. Morarka, N. G. Rudawski, and M. E. Law, “Level set modeling of the orientation dependence of solid phase epitaxial regrowth,” International Workshop on INSIGHT in Semiconductor Device Fabrication, Metrology, and Modeling (2007).