Conference Presentations (1986)

Conference Presentations (1986)

S. Prussin and K.S. Jones, “Role of Implant Energy on Defect Structures for Phosphorous Implanted Silicon,” Mat. Res. Soc. Symp. Proc., 71, 191-195, 1986.

K.S. Jones and S. Prussin, “Defect Structures Generated by Buried Amorphous Layer Regrowth in <100> Arsenic Implanted Silicon,” Mat. Res. Soc. Symp. Proc., 71, 173-179, 1986.