Peer-Reviewed Publications (1990)

Peer-Reviewed Publications (1990)

S. J. Pearton, W. S. Hobson, A. E. Von Neida, N. M. Haegel, K. S. Jones, N. Morris, and B.J. Sealy, “Implant activation and redistribution in AlxGa1-xAs,” J. Appl. Phys. 67, 2396 (1990).

S. J. Pearton, W. S. Hobson, F. A. Baiocchi, B. Emerson, and K. S. Jones, “Reactive ion etching of InP, InGaAs, InAlAs: comparison of C2H6/H2 with CCl2F2/O2,” J. Vac. Sci. Technol. B 8, 57 (1990).

S. Prussin and K. S. Jones, “Role of ion mass, implant dose, and wafer temperature on end-of-range defects,” J. Electrochem. Soc. 137, 1912 (1990).

S. J. Pearton, W. S. Hobson, F. A. Baiocchi, and K. S. Jones, “Reactive ion etching of InAs, InSb, and GaSb in CCl2F2/O2 and C2H6/H2,” J. Electrochem. Soc. 137, 1924 (1990).

S. J. Pearton, B. Jalali, J. M. Poate, J. D. Fox, K. W. Kemper, C. W. Magee, and K. S. Jones, “High-energy (56 MeV) oxygen implantation in Si, GaAs, and InP,” Appl. Phys. Lett. 57, 2253 (1990).

S. J. Pearton, U. K. Chakrabarti, A. P. Perley, and K. S. Jones, “Ion milling damage in InP and GaAs,” J. Appl. Phys. 68, 2760 (1990).