Conference Presentations (2018)

Conference Presentations (2018)

K. Haynes, X. Hu, B. D. Wirth, C. Hatem, K. S. Jones. Ultralow Energy, Elevated Temperature Implants of High Doses of Helium into Silicon. 22nd International Conference on Ion Implantation Technology (2018).

K. S. Jones, E. Turner, J. Young Lee, H. van Meer, N. Variam. New Defect Formation Mechanism Associated with High Energy Low Dose P Implants into Si Fins. 22nd International Conference on Ion Implantation Technology (2018).